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Impact of boron diffusion on oxynitrided gate oxides in 4H-SiC ...

E. Ö. Sveinbjörnsson, F. Allerstam, H. Ö. Ólafsson, G. Gudjónsson, D. Dochev, T. Rödle, and R. Jos, Mater. Sci. Forum 556–557, 487–492 (2007).

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