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並前往https://www.asm.com/Pages/Press-releases/Taiwan-Foundry-Selects-ASM-International-for-High-k-ALD.aspx

Taiwan Foundry Selects ASM International for High-k ALD

ASM's high-k gate films include multiple hafnium based oxides, with aluminum oxide and lanthanum oxide available as high-k cap layers for metal electrode work ...

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