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並前往https://www.semanticscholar.org/paper/Comparison-between-HDP-CVD-and-PECVD-silicon-for-Yota-Janani/e5b55ea46c80f857dbb2e18004817a058f4970cd

Comparison between HDP CVD and ... - Semantic Scholar

High-density plasma CVD (HDP CVD) silicon nitride has been investigated for its use in advanced interconnect applications.

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