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並前往https://www.semanticscholar.org/paper/FinFET-a-self-aligned-double-gate-MOSFET-scalable-Hisamoto-Lee/3381036a5d01c23982130572bfce3c31b3944b27

FinFET-a self-aligned double-gate MOSFET scalable to 20 ...

MOSFETs with gate length down to 17 nm are reported. To suppress the short channel effect, a novel self-aligned double-gate MOSFET, FinFET, is proposed.

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