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並前往https://books.google.com.tw/books?id=S43SBQAAQBAJ&pg=PA383&lpg=PA383&dq=FOSB+FOUP&source=bl&ots=Dz4jpj_6cF&sig=ACfU3U0s9brByzZV_6YrVn6HVxF5jmWJFA&hl=zh-TW&sa=X&ved=2ahUKEwikt6bJ6saAAxWOd2wGHcR-D_8Q6AF6BQjHAhAD

Crystal Growth and Evaluation of Silicon for VLSI and ULSI

(a) (b) (c) FIGURE 11.5 (a) and (b) The 450 mm silicon wafer FOUP packing used for shipment, and (c) for storage. (From P. Lee, “450 mm FOUP/FOSB ...

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