矽甲烷 SILANCE. 20.二矽乙烷 DISILANCE. 21.無水氨氣 AMMONIA. 22.二氯矽甲烷 DICHLOROSILANCE. 23.氯苯 Chlorobenzene. 24.二氧化矽蝕刻液BUFFERED OXIDE ETCH.
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