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並前往http://homepage.ntu.edu.tw/~nlw001/handouts/semiconductor/Ch5_Oxidation_Diffusion.pdf

Ch5 Oxidation and Diffusion (氧化與擴散) Overall View

Only for critical parts, but not the chamber ... Wet oxidation. Etching ... http://www.ee.byu.edu/cleanroom/color_chart.parts/sio2_chart.jpg.

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