LPCVD SiH4, N2, NH3. LPCVD C8H22N2Si (BTBAS). W (Tungsten). WF6 (Tungsten hexafluoride), SiH4, H2. WSi2. WF6 (Tungsten hexafluoride), SiH4, H2. Conductors.
確定! 回上一頁