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並前往https://www.icxcess.com/ja/nanochip/nanochip-fab-solutions/december-2014/minimizing-pilot-runs-with-observable-r2r-control-for-high-mix-semiconductor-manufacturing

用可观察的R2R控制最小化高混合半导体制造中的导频

The goal of the evaluation was to reduce the number of pilot runs after chamber PM without any deterioration in run-time controller performance.

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