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並前往https://www.semanticscholar.org/paper/Clean-room-Technologies-for-the-Mini-environment-Kure-Hanaoka/5c000e7c2022761af486e82bceb6ba541e2bd6de

Clean-room Technologies for the Mini-environment Age

... to “localized” cleaning environments by means of “mini environments”— namely, an enclosed, local clean environment (1),(2) (see Fig. 1).

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