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並前往https://www.en-standard.eu/csn-en-iso-14644-2-cleanrooms-and-associated-controlled-environments-part-2-monitoring-to-provide-evidence-of-cleanroom-performance-related-to-air-cleanliness-by-particle-concentration-1/

CSN EN ISO 14644-2 - European Standards

ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems.

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