Ptt 大爆卦 | euv duv是什麼 - 前往 https://www.semi.org/sites/semi.org/files/2021-03/210209-%E5%8D%A1%E4%BD%8DEUV%E4%BE%9B%E6%87%89%E9%8F%88%20-%20EUV%20pellicle%E5%B0%88%E5%88%A9%E4%BD%88%E5%B1%80%E8%A7%A3%E6%9E%90-v1F.pdf?utm_campaign=SEMI%20Taiwan%20Newsletter&utm_source=hs_email&utm_medium=email&_hsenc=p2ANqtz--ZxmUWmTXF88WipSXXJbxZJe-EUX9HuJAIu2iwwBOZMBE1TgvEMF5ZsKIJxM3YlqeetJu5vvdlvTci4sXKzOnQGSlDEQ

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卡位EUV 供應鏈- EUV pellicle 專利佈局分析

2019 年5 月，ASML 與三井化學簽署授權合約，將ASML 的EUV 光罩護膜(EUV pellicle)技. 術授權給三井生產。ASML 是目前唯一進行量產的EUV 曝光機供應商。EUV 曝光機的量.

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