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並前往https://www.hitachi-hightech.com/global/en/products/microscopes/sem-tem-stem/nano-probing-system/ne4000.html

Electron Beam Absorbed Current (EBAC) Characterization ...

The Hitachi NE4000 nanoEBAC is an electron beam based probing system for electrical characterization and EBAC analysis and imaging of microelectronic device ...

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