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並前往https://www.appliedmaterials.com/nanochip/nanochip-fab-solutions/december-2014/reducing-gate-oxide-uniformity-drift-in-rtp-tools

Reducing Gate Oxide Uniformity Drift in RTP Tools - Applied ...

Rapid thermal oxidation (RTO) is a process used to grow ultrathin oxide films. RTO causes the thermal oxidation of any exposed silicon and, when carried out in ...

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