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並前往https://www.electrochem.org/dl/ma/203/pdfs/2045.pdf

Local Deposition Rates of α-Al2O3 from AlCl3-CO2-H2-HCl ...

Local Deposition Rates of α-Al2O3 from. AlCl3-CO2-H2-HCl derived with PHOENICS-CVD from Thermogravimetric Measurements in a.

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