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並前往https://www.researchgate.net/figure/Color-online-IL-Process-flow-a-Vaporized-material-is-frozen-onto-the-cold-sample-to_fig1_333584793

(Color online) IL Process flow. (a) Vaporized material is frozen ...

(a) Vaporized material is frozen onto the cold sample to form a layer of ice resist. (b and f) Focused e-beam exposes ice resist for patterning.

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