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並前往https://onlinelibrary.wiley.com/doi/pdf/10.1002/eej.20343

Effective sticking coefficient measurement of radicals for aâ ...

Key words: plasma CVD; a-SiN:H; sticking coef- ficient; Monte Carlo simulation. 1. Introduction. Because the properties of a-SiN:H film prepared by plasma CVD ...

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