你即將離開本站

並前往https://www.euvlitho.com/2016/P61.pdf

EUV High-NA scanner to extend EUV single exposure - EUV ...

Kneer, et al, “EUV lithography optics for sub-9nm resolution,” Proc. SPIE 9422, (2015). NA 0.25 NA 0.33 NA >0.5 Design examples. Wafer level.

確定！ 回上一頁

查詢 「Resolution NA」的人也找了：

  1. Numerical aperture
    2.
  2. Microscope resolution
    3.
  3. Spatial resolution
    4.
  4. Diffraction resolution
    5.
  5. lateral resolution意思
    6.
  6. Rayleigh criterion, resolution
    7.
  7. Resolving power
    8.
  8. Resolution NA
    9.