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Multi-Patterning EUV Vs. High-NA EUV - Semiconductor ...

Still in R&D, ASML's new high-NA EUV system features a radical 0.55 NA lens capable of 8nm resolutions. An extension of the current NA ...

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查詢 「Resolution NA」的人也找了：

  1. Numerical aperture
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  2. Microscope resolution
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  3. Spatial resolution
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  4. Diffraction resolution
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  5. lateral resolution意思
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  6. Rayleigh criterion, resolution
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  7. Resolving power
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  8. Resolution NA
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