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並前往http://euvlsymposium.lbl.gov/pdf/2015/Oral_Wednesday/Session9_EUV%20Lithography%20Extendibility/S9.2_Heil.pdf

Anamorphic High NA Optics enabling EUV Lithography with ...

The EUV Optical System: The finer the resolution, the larger the angles! Page 5. 5. Carl Zeiss SMT GmbH, Tilmann Heil et al. 2015 EUVL ...

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