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並前往https://www.semanticscholar.org/paper/Using-a-remote-plasma-source-for-n-type-Plasma-Srivastava-Wilson/ce6d65f7dc006dbf643efe30518a78e49a1b5546

Using a remote plasma source for n-type Plasma Doping ...

The Applied Materials VSE Plasma Doping (PLAD) tool consists of an inductively coupled RF ion source and a backside-cooled platen with a ...

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