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並前往https://www.bnl.gov/cfn/groups/Nanofabrication/cleanroom/ESR&USER/Piranha%20Etch%20Operator%20Aid.pdf

Piranha Etch Use in CFN Clean Room

Piranha etch is used to remove organic residues from substrates. Acid piranha is a 3:1 mixture of concentrated sulfuric acid (H2SO4) with hydrogen peroxide ...

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