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並前往https://semiengineering.com/large-scale-nanometer-thick-graphite-film-ngf-as-a-euv-pellicle/

Large-Scale Nanometer-Thick Graphite Film (NGF) As A EUV ...

A new technical paper titled “Graphite Pellicle: Physical Shield for Next-Generation EUV Lithography Technology” was published by ...

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