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並前往https://www.semanticscholar.org/paper/Wafer-Level-Packaging-Method-for-RF-MEMS-Using-BCB-Gong-Zhang/df1398d8ebdeb72b97bf44bc97bb93e2074f4e59

Wafer-Level Packaging Method for RF MEMS Applications ...

A radio-frequency micro-electro-mechanical system (RF MEMS) wafer-level packaging (WLP) method using pre-patterned benzo-cyclo-butene (BCB) ...

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