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並前往https://www.semanticscholar.org/paper/Immersion-Lithography-Process-and-Control-Malik-Hazari/ababcf4f91785b715b5a9c726adcd4a9173bffc1

Immersion Lithography Process and Control Challenges

Immersion optics enable the printing of smaller design rules by increasing the effective numerical aperture (NA) of the imaging lens.

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