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並前往https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2020/06/D-Series_User_Manual.pdf

Alpha-Step® D-500 and D-600 User Manual - EPFL

The KLA-Tencor Alpha-Step Development Series Stylus Profiler is a computerized, high-sensitivity surface profiler that measures step height, roughness.

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