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並前往http://www.nano.pitt.edu/sites/default/files/Equipment-SOP/CR-Profilometer_KLA_Tencor_Alpha_Step_IQ_User_Guide_2020.pdf

Nanoscale Fabrication & Characterization Facility KLA Tencor ...

KLA Tencor Alpha Step IQ Surface Profiler. Users Guide ... distances as well as waviness in a scan over a full surface length of 10- mm (0.4-in.).

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