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並前往https://books.google.com.tw/books?id=XCv0AtLTR-AC&pg=PA49&lpg=PA49&dq=KLA+FX200&source=bl&ots=mpp8uaK5qF&sig=ACfU3U31EhPpYB-EUZ30Q723Htqjs7yp9A&hl=zh-TW&sa=X&ved=2ahUKEwjJ_9acufmBAxV7s1YBHRr1CP4Q6AF6BQi-ARAD

Solid State (General) - 214th ECS Meeting/PRiME 2008

... ( KLA Tencor , Model FX200 ) Table . I. The Detail Deposition Condition of Substrates Substrate BPSG TiSix HDP Deposition Condition B 3.1 % , P 1.9 % , 540 ...

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