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並前往https://www.semanticscholar.org/paper/Ion-Implant-Beam-Guide-Material-Evaluation-Jones-Sinclair/e0d7af7e19c6b2e1088a686ff418d835b7995196

Ion Implant Beam Guide Material Evaluation | Semantic Scholar

Proceedings of 11th International Conference on Ion Implantation Technology. 1996. Many issues contribute to the particle contamination of implanters.

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