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並前往https://www.semanticscholar.org/paper/The-Infineon-Silicon-MEMS-Microphone-Dehe-Wurzer/70c823f96d77186fae38cb2e834ebcc6cc954b14

The Infineon Silicon MEMS Microphone | Semantic Scholar

This paper reports on the state of the art silicon micromachined microphone utilizing a dual poly silicon membrane system. MEMS chips from 1.4mm down to ...

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