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並前往https://www.semanticscholar.org/paper/5nm-CMOS-Production-Technology-Platform-featuring-Yeap-Chen/b4d8175cd63a0d15f56a03a800a213c0c4597dea

5nm CMOS Production Technology Platform featuring full ...

G. Yeap, X. Chen, +56 authors M. Wang; Published 1 December 2019; Computer Science; 2019 IEEE International Electron Devices Meeting (IEDM).

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