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並前往https://www.semanticscholar.org/paper/A-parametric-study-of-ICP-RIE-etching-on-a-lithium-Chang-Yu/cea8f679311c9e8154236f9232033c133a308b43

A parametric study of ICP-RIE etching on a ... - Semantic Scholar

Z-cut LiNbO3 single crystal wafers were etched by the inductively coupled plasma reactive ion etching (ICP-RIE) technique by using the boron ...

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