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並前往https://www2.ece.ohio-state.edu/~berger/papers/2006jun_el_park_low_damage_HBr_plasma_etch_SiGe_RITD.pdf

Low sidewall damage plasma etching using ICP-RIE with HBr ...

coupled plasma reactive ion etching (ICP-RIE) yielded the better results. The resulting RITDs processed by ICP-RIE using HBr ... voltage, V.

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