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並前往https://www.semanticscholar.org/paper/High-aspect-ratio-CPW-fabricated-using-silicon-bulk-Todd-Huang/136fb30cb99b0e39ed7220a6cf531f3acece49ff

High aspect ratio CPW fabricated using silicon bulk ...

A silicon micromachining process has been developed to fabricate high aspect ratio CPW (HARC). The micromachining process combines Si DRIE, ...

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