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並前往https://www.lesker.com/newweb/deposition_materials/depositionmaterials_sputtertargets_1.cfm?pgid=car2

Carbon (Pyrolytic Graphite) C Sputtering Targets - Kurt J ...

Due to open spaces in Carbon's structural lattice, sputter rates are low and the process is very time-consuming. Standard carbon graphite targets are typically ...

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