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並前往https://www.theregister.com/2014/02/25/asml_euv_scanner_fails_at_tsmc_and_intel_investigates_dsa/

First 'production-ready' EUV scanner laser-fries its guts at ...

First 'production-ready' EUV scanner laser-fries its guts at TSMC. Intel seeks alternative tech. Finicky chip-etching tech of the future ...

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