你即將離開本站

並前往https://iopscience.iop.org/article/10.1088/1361-6528/ac3bee/meta

Reduction of EUV resist damage by neutral beam etching

In this study, the radiation damage to EUV resist during etching of hardmask ... of an N7 integrated fab process for metal oxide EUV photoresist Extrem.

確定！ 回上一頁

查詢 「EUV photoresist」的人也找了：

  1. euv是什麼
    2.
  2. euv中文
    3.
  3. euv光阻
    4.
  4. EUV photoresist
    5.
  5. euv光罩
    6.
  6. euv原理
    7.
  7. EUV scanner
    8.
  8. euv光刻機
    9.