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並前往https://people.eecs.berkeley.edu/~attwood/sxr2009/lecnotes/07_EUV_Lithography_2009.pdf

Overview of EUV Lithography

Extreme Ultraviolet (EUV) Lithography. Based on Multilayer Coated Optics. Reflective mask. Absorber pattern. Multilayer mirror. Wafer to record.

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