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並前往https://books.google.com.tw/books?id=aGUxoVTYjA8C&pg=PA139&lpg=PA139&dq=cu+h2o2&source=bl&ots=bXtXa4aN3q&sig=ACfU3U3aLkCoUdQ2kZeVKp_5_F9_nRvJ8A&hl=zh-TW&sa=X&ved=2ahUKEwiqyM25kJz2AhXLILkGHenmAbsQ6AF6BQjIAhAD

Handbook of Physical Vapor Deposition (PVD) Processing

... ceramic (C) Can damage Cu Al H3PO4/HNO3/H2O Al NaOH BCl3 (plasma) molar SS,G,C Ti,Ag C H2O2 10–30% SS,G,C Cu,Fe KOH/H2O saturated/hot G,C O2 (plasma) SS ...

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