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Poly-Si Unetch Failure Due to Etching Rate Dependence of Si ...

Dahyun Nam*, Sukchan Song, Eunbee Go, Bongsu Chae, Ara Kim, BoMi Kim, Haeran Kim, Ji-Sun Yang, SoYeon. Han, Hyunjun Ryu, Shinyoung Chung, Brandon Lee.

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