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並前往http://nanosioe.ee.ntu.edu.tw/semilab/MSDS/implantation/2.pdf

Boron Trifluoride BF3 Safety Data Sheet SDS P4567

Boron trifluoride. Safety Data Sheet P-4567. This SDS conforms to U.S. Code of Federal Regulations 29 CFR 1910.1200, Hazard Communication.

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