Ptt 大爆卦 | AlN microphone - 前往 https://link.springer.com/article/10.1007/s12633-021-01437-1

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Design and Fabrication of Piezoelectric MEMS Sensor for ...

Williams MD, Griffin BA, Reagan TN, Underbrink JR, Sheplak M (2012) An AlN MEMS piezoelectric microphone for aeroacoustic applications.

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