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並前往https://www.semanticscholar.org/paper/Uniformity-improvement-for-200-mm-APCVD-epitaxial-Kunle-Baumgartl/28a6c2b39edc6582bc137fe5addab886e85c7cf1

Uniformity improvement for 200 mm APCVD epitaxial Si ...

An upgrade kit for the 200 mm Applied Materials Epi Centura was released. The retrofit includes an alignment tool for the setup of the ...

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