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並前往https://www.researchgate.net/publication/263858325_Uniformity_Improvement_for_200_mm_APCVD_Epitaxial_Si_Films_Enabled_by_Retrofit_of_Applied_Materials_Epi_Centura

Uniformity Improvement for 200 mm APCVD Epitaxial Si ...

PDF | An upgrade kit for the 200 mm Applied Materials Epi Centura was released. The retrofit includes an alignment tool for the setup of the process.

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