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並前往https://www.researchgate.net/figure/02-m-lines-spaces-written-with-25-C-cm-2-dose-at-40-keV-PAB-90-C-4-min-PEB-90-C-4_fig1_224464141

0.2 m lines/spaces written with 2.5 C cm 2 dose at 40 keV. PAB 90 ...

Aspects of the formulation of a highly sensitive cresol epoxy novolac‐based chemically amplified negative resist (epoxy resist, EPR) and optimization of ...

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